Candela Surface Defect Inspection Systems | KLA
Candela ® 8720 Surface Defect Inspection System. High sensitivity wafer defect inspection tool, integrating surface defect detection and photoluminescence metrology for GaN applications in HBLED, MicroLED, VCSELs, LiDAR, IoT, 5G and other high-end compound semiconductor applications. Learn more
Candela ® 6300 Series Optical Surface Analyzer Systems
Optical Surface Analyzer (OSA) for tool and process monitoring, through surface defect detection and classification of surface defects including particle, stains, scratches and macro epi defects for photonics, LED, communications and other compound semiconductor applications.
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Candela 8520 C
The Candela 8520 is the successor to the Candela CS920, which was the first of its kind to integrate macro/micro detection for surface and crystal defects in a unified inspection platform. It employs proprietary optical technology to simultaneously measure scatter intensity at varying angles of incidence,
Candela 8420 | Surface Defect Inspection System | KLA
The Candela 8420 is a surface defect inspection system that uses multi-channel detection and rule-based defect binning to provide particle and scratch detection on opaque, translucent, and transparent wafers.
Candela Instruments Innovation History | Defect Inspectors | KLA ...
KLA-Tencor acquires Candela Instruments, the leading supplier for laser-based surface inspection systems optimized for the data storage industry, measuring metal and glass substrates, plus finished media.
KLA Instruments Innovation History | Measurement and Inspection ...
KLA-Tencor acquires Candela Instruments, the leading supplier for laser-based surface inspection systems optimized for the data storage industry, measuring metal and glass substrates, plus finished media.
Metrology Tools and Defect Inspection Instruments and …
The Candela ® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, …
New Defect Inspection System for SiC, GaN Substrates - KLA
The Candela 8520 wafer inspection system features the ability to close critical defect detection gaps such as stacking faults on bare wafers and basal plane dislocations following epitaxial growth. The system also features analysis tools such as on-tool defect review, die grading and contour mapping.
Wafer Manufacturing - KLA
Specialized wafer inspection and review tools assess wafer surface quality and detect, count and bin defects during production and as a critical part of outgoing wafer qualification. Wafer geometry systems ensure the wafer shape is extremely flat and uniform in thickness, with precisely controlled wafer shape topography.
KLA-Tencor Announces Adoption of Its Candela CS20 ... - KLA …
Mar 30, 2010 · KLA-Tencor's Candela CS20 system is uniquely designed for the inspection of transparent materials—gallium nitride and sapphire—with simultaneous detection of surface reflectivity, topography, scatter and phase signatures.