This enables the EUV lithography era of today, which is likely to continue for the foreseeable future. Initially, EUV became ...

As a result, several approaches are being considered to increase the resolution of DUV lithography yet further, and these will now be discussed. The current maximum NA for projection optics of 1. ...

Intel has been in the news lately thanks to its decision to buy the world's first high numerical aperture (High-NA) lithography machine from ASML in the Netherlands. So far, Intel is the only ...