Kernstück einer CVD-Anlage ist der Reaktor mit dem Substrat (Abb.). Er ist mit einem Gasleitungssystem verbunden, über das die Zuleitung der Precursoren, teils mit Hilfe eines Trägergases (H 2, N 2, ...
CVD Equipment Corp. engages in the design, development, and manufacture of chemical vapor deposition, gas control, and other state-of-the-art equipment and process solutions. It operates through ...
Chemical Vapor Deposition (CVD) is a widely used technique in materials science, particularly in the fabrication of thin films and coatings, as well as the synthesis of advanced materials. It involves ...